Fingerprint
Dive into the research topics of 'Concentration and depth profiles of elements in SixNyHz/Si thin films produced by PECVD'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
G. Murillo, E. Andrade, J. C. Alonso, L. Acosta, M. F. Rocha, E. P. Zavala, R. Policroniades
Research output: Contribution to journal › Article › peer-review