Characterization of Cd1-x Znx Te (0 ≤ x ≤ 1) nanolayers grown by atomic layer deposition on GaSb and GaAs (001) oriented substrates

Joel Díaz-Reyes, Roberto Saúl Castillo-Ojeda, José Eladio Flores-Mena

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

ZnTe, CdTe, and the ternary alloy CdZnTe are important semiconductor materials used widely for the detection of an important range of electromagnetic radiation as gamma ray and X-ray. Although, recently these materials have acquired renewed importance due to the new explored nanolayer properties of modern devices. In addition, as shown in this work they can be grown using uncomplicated synthesis techniques based on the deposition in vapour phase of the elemental precursors. This work presents the results obtained from the deposition of nanolayers of these materials using the precursor vapour on GaAs and GaSb (001) substrates. This growth technique, extensively known as atomic layer deposition (ALD), allows the layers growth with nanometric dimension. The main results presented in this work are the used growth parameters and the results of the structural characterization of the layers by the means of Raman spectroscopy measurements. Raman scattering shows the peak corresponding to longitudinal optical (LO)-ZnTe, which is weak and slightly redshift in comparison with that reported for the ZnTe bulk at 210 cm-1. For the case of the CdTe nanolayer, Raman spectra presented the LO-CdTe peak, which is indicative of the successful growth of the layer. Its weak and slightly redshift in comparison with that reported for the CdTe bulk can be related with the nanometric characteristic of this layer. The performed highresolution X-ray diffraction (HR-XRD) measurement allows to study some important characteristics such as the crystallinity of the grown layer. In addition, the HR-XRD measurement suggests that the crystalline quality has dependence on the growth temperature.

Original languageEnglish
Pages (from-to)97-108
Number of pages12
JournalJournal of Electronic Science and Technology
Volume17
Issue number2
DOIs
StatePublished - 2019

Keywords

  • Atomic layer deposition (ALD)
  • Defect generation mechanism
  • III-V substrates
  • Ternary alloy CdZnTe
  • Zn and Cd mixture

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