TY - GEN
T1 - CdS large area thin films deposited on soda lime glass and conducting substrates by sputtering technique
AU - Hernandez-Contreras, H.
AU - Ximello-Quiebras, J. N.
AU - Mendoza-Perez, R.
AU - Contreras-Puente, G.
AU - Aguilar-Hernandez, J.
AU - Vigil-Galan, O.
AU - Cruz-Gandarilla, F.
N1 - Publisher Copyright:
© 2000 IEEE.
PY - 2000
Y1 - 2000
N2 - The processing of large area thin films solar cells represents a challenge, mainly due to the optimal setting of the different critical growth parameters in this scaling-up process, than can guarantee a homogeneus-surface-photovoltaics response in the subminimodule architecture. We have been working with a Radio-Frequency Planar Magnetron Sputtering (RF-PMS) system, processing 450 cm areas of CdS thin films grown on soda lime glasses and conducting glasses (SnO2:F-7Ω/□), using for it a 6′ balanced gun. The films have been processed with different growth conditions, like substrate temperatures (100 > Ts > 275°C), Ar chamber-pressure (10 > PAr > 20 mTorr), and radio frequency power (rf-pw <310 watts). The films were characterized by several morphological, optical, structural and electrical techniques, presenting in this work the corresponding measurements. Our results show that the best polycrystalline perfection, adherence and pinholes free surfaces are obtained for growth conditions of Ts at 250°C.
AB - The processing of large area thin films solar cells represents a challenge, mainly due to the optimal setting of the different critical growth parameters in this scaling-up process, than can guarantee a homogeneus-surface-photovoltaics response in the subminimodule architecture. We have been working with a Radio-Frequency Planar Magnetron Sputtering (RF-PMS) system, processing 450 cm areas of CdS thin films grown on soda lime glasses and conducting glasses (SnO2:F-7Ω/□), using for it a 6′ balanced gun. The films have been processed with different growth conditions, like substrate temperatures (100 > Ts > 275°C), Ar chamber-pressure (10 > PAr > 20 mTorr), and radio frequency power (rf-pw <310 watts). The films were characterized by several morphological, optical, structural and electrical techniques, presenting in this work the corresponding measurements. Our results show that the best polycrystalline perfection, adherence and pinholes free surfaces are obtained for growth conditions of Ts at 250°C.
UR - http://www.scopus.com/inward/record.url?scp=84949566940&partnerID=8YFLogxK
U2 - 10.1109/PVSC.2000.915964
DO - 10.1109/PVSC.2000.915964
M3 - Contribución a la conferencia
AN - SCOPUS:84949566940
T3 - Conference Record of the IEEE Photovoltaic Specialists Conference
SP - 700
EP - 702
BT - Conference Record of the 28th IEEE Photovoltaic Specialists Conference - 2000
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 28th IEEE Photovoltaic Specialists Conference, PVSC 2000
Y2 - 15 September 2000 through 22 September 2000
ER -