CdS and CdTe large area thin films processed by radio-frequency planar-magnetron sputtering

H. Hernández-Contreras; G. Contreras-Puente; J. Aguilar-Hernández; A. Morales-Acevedo; J. Vidal-Larramendi; O. Vigil-Galan

doi:10.1557/proc-668-h8.5

CdS and CdTe large area thin films processed by radio-frequency planar-magnetron sputtering

H. Hernández-Contreras, G. Contreras-Puente, J. Aguilar-Hernández, A. Morales-Acevedo, J. Vidal-Larramendi, O. Vigil-Galan

Escuela Superior de Física y Matemáticas (ESFM)

Research output: Contribution to journal › Conference article › peer-review

Abstract

The processing of large area thin films solar cells represents a challenge, mainly due to the need for optimal setting of the critical growth parameters for scaling-up of the processes that guarantee homogeneous properties in the sub-minimodule architecture. We have been working with a Radio-Frequency Planar Magnetron Sputtering (RF-PMS) system, processing 450 cm² areas of CdS and CdTe thin films grown on soda lime glasses and conducting glasses (SnO₂:F-7Ω/ ) for CdS, using for it a 6″ balanced gun. The films have been processed with substrate temperatures (T_s) of 250°C, Ar chamber-pressure of 20 mTorr, and radio frequency power of 300 watts. The films were characterized by morphological, optical and electrical techniques, presenting in this work the corresponding measurements. Our results show that the better polycrystalline perfection, adherence and pinhole free films are obtained at substrate temperatures of 250°C.

Translated title of the contribution	Películas delgadas de área grande de CdS y CdTe procesadas por pulverización catódica de magnetrón planar de radiofrecuencia
Original language	English
Pages (from-to)	H851-H855
Journal	Materials Research Society Symposium - Proceedings
Volume	668
DOIs	https://doi.org/10.1557/proc-668-h8.5
State	Published - 2001
Event	II - VI Compound Semiconductor Photovoltaic Materials - San Francisco, CA, United States Duration: 16 Apr 2001 → 20 Apr 2001

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@article{e8b8ba05023e4247a0f5ecccc38d683e,

title = "CdS and CdTe large area thin films processed by radio-frequency planar-magnetron sputtering",

abstract = "The processing of large area thin films solar cells represents a challenge, mainly due to the need for optimal setting of the critical growth parameters for scaling-up of the processes that guarantee homogeneous properties in the sub-minimodule architecture. We have been working with a Radio-Frequency Planar Magnetron Sputtering (RF-PMS) system, processing 450 cm2 areas of CdS and CdTe thin films grown on soda lime glasses and conducting glasses (SnO2:F-7Ω/ ) for CdS, using for it a 6″ balanced gun. The films have been processed with substrate temperatures (Ts) of 250°C, Ar chamber-pressure of 20 mTorr, and radio frequency power of 300 watts. The films were characterized by morphological, optical and electrical techniques, presenting in this work the corresponding measurements. Our results show that the better polycrystalline perfection, adherence and pinhole free films are obtained at substrate temperatures of 250°C.",

author = "H. Hern{\'a}ndez-Contreras and G. Contreras-Puente and J. Aguilar-Hern{\'a}ndez and A. Morales-Acevedo and J. Vidal-Larramendi and O. Vigil-Galan",

note = "Funding Information: This work was partially supported by CONACyT-Mexico.; II - VI Compound Semiconductor Photovoltaic Materials ; Conference date: 16-04-2001 Through 20-04-2001",

year = "2001",

doi = "10.1557/proc-668-h8.5",

language = "Ingl{\'e}s",

volume = "668",

pages = "H851--H855",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}

TY - JOUR

T1 - CdS and CdTe large area thin films processed by radio-frequency planar-magnetron sputtering

AU - Hernández-Contreras, H.

AU - Contreras-Puente, G.

AU - Aguilar-Hernández, J.

AU - Morales-Acevedo, A.

AU - Vidal-Larramendi, J.

AU - Vigil-Galan, O.

N1 - Funding Information: This work was partially supported by CONACyT-Mexico.

PY - 2001

Y1 - 2001

N2 - The processing of large area thin films solar cells represents a challenge, mainly due to the need for optimal setting of the critical growth parameters for scaling-up of the processes that guarantee homogeneous properties in the sub-minimodule architecture. We have been working with a Radio-Frequency Planar Magnetron Sputtering (RF-PMS) system, processing 450 cm2 areas of CdS and CdTe thin films grown on soda lime glasses and conducting glasses (SnO2:F-7Ω/ ) for CdS, using for it a 6″ balanced gun. The films have been processed with substrate temperatures (Ts) of 250°C, Ar chamber-pressure of 20 mTorr, and radio frequency power of 300 watts. The films were characterized by morphological, optical and electrical techniques, presenting in this work the corresponding measurements. Our results show that the better polycrystalline perfection, adherence and pinhole free films are obtained at substrate temperatures of 250°C.

AB - The processing of large area thin films solar cells represents a challenge, mainly due to the need for optimal setting of the critical growth parameters for scaling-up of the processes that guarantee homogeneous properties in the sub-minimodule architecture. We have been working with a Radio-Frequency Planar Magnetron Sputtering (RF-PMS) system, processing 450 cm2 areas of CdS and CdTe thin films grown on soda lime glasses and conducting glasses (SnO2:F-7Ω/ ) for CdS, using for it a 6″ balanced gun. The films have been processed with substrate temperatures (Ts) of 250°C, Ar chamber-pressure of 20 mTorr, and radio frequency power of 300 watts. The films were characterized by morphological, optical and electrical techniques, presenting in this work the corresponding measurements. Our results show that the better polycrystalline perfection, adherence and pinhole free films are obtained at substrate temperatures of 250°C.

UR - http://www.scopus.com/inward/record.url?scp=0035556702&partnerID=8YFLogxK

U2 - 10.1557/proc-668-h8.5

DO - 10.1557/proc-668-h8.5

M3 - Artículo de la conferencia

AN - SCOPUS:0035556702

SN - 0272-9172

VL - 668

SP - H851-H855

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - II - VI Compound Semiconductor Photovoltaic Materials

Y2 - 16 April 2001 through 20 April 2001

ER -

CdS and CdTe large area thin films processed by radio-frequency planar-magnetron sputtering

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