Catalytic CVD production of carbon nanotubes using ethanol

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Abstract

We describe the implementation of a chemical vapor deposition (CVD) apparatus for the synthesis of carbon nanotubes using ethanol as carbon source and evaluate several substrate materials. Carbon nanotubes are observed to form on various substrates at 750 °C after 20 min of ethanol flow. We examine substrates such as quartz, conductive glass (SnO2:F film deposited on soda-lime glass), porous alumina and nickel plates. As catalysts, we assess the use of cobalt and iron particles obtained from dried ethanol solutions of the corresponding acetates. Our samples are analyzed with Raman spectroscopy as well as with scanning electron microscopy.

Original languageEnglish
Pages (from-to)495-498
Number of pages4
JournalMicroelectronics Journal
Volume36
Issue number3-6
DOIs
StatePublished - Mar 2005

Keywords

  • Carbon nanotubes
  • Electron microscopy
  • Fabrication and characterization of nanoscale materials
  • Raman scattering

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