Annealing impact on emission and phase varying of Nd-doped Si-rich-HfO₂ films prepared by RF magnetron sputtering

Engineering & Materials Science

• Photoluminescence 100%
• Magnetron sputtering 82%
• Annealing 61%
• Ions 40%
• X ray photoelectron spectroscopy 21%
• Microscopic examination 19%
• X ray diffraction 17%
• Light emission 13%
• Scanning 13%
• Defects 12%
• X-Ray Emission Spectrometry 11%
• Phase separation 11%
• Crystal structure 11%
• Energy transfer 10%
• Argon 9%
• Atoms 9%
• Energy dispersive spectroscopy 9%
• Crystals 8%
• Nitrogen 8%
• Plasmas 8%
• Furnaces 7%
• Heat treatment 7%
• Temperature 3%

Chemistry

• Magnetron Sputtering 71%
• Annealing 48%
• Photoluminescence 47%
• Liquid Film 29%
• Ion 20%
• Tetragonal Space Group 18%
• X-Ray Photoelectron Spectroscopy 14%
• X-Ray Diffraction Method 10%
• Photoluminescence Spectrum 10%
• Energy Dispersive X-Ray Spectroscopy 9%
• Phase Separation 8%
• Energy Transfer 8%
• Shape 6%
• Flow 6%
• Plasma 6%
• Nitrogen 6%
• Crystal Structure 5%
• X-Ray Diffraction 5%

Physics & Astronomy

• magnetron sputtering 51%
• photoluminescence 43%
• annealing 37%
• ions 20%
• x rays 19%
• photoelectron spectroscopy 14%
• electronics 13%
• microscopy 12%
• scanning 11%
• argon plasma 10%
• defects 9%
• matrices 9%
• diffraction 9%
• light emission 8%
• furnaces 7%
• tendencies 7%
• energy transfer 7%
• crystal structure 6%
• nitrogen 6%
• atmospheres 6%
• spectroscopy 4%
• atoms 4%
• crystals 4%
• temperature 2%
• energy 2%