A novel soft deposition methodology for textured ZnO:Al thin films as efficient transparent conductive oxide layers

Engineering & Materials Science

• Sputtering 100%
• Thin films 73%
• Luminescent devices 48%
• Transparent conducting oxides 47%
• Optical properties 32%
• Optoelectronic devices 30%
• Structural properties 28%
• Electric properties 27%
• Solar cells 27%
• Flow of gases 25%
• Plasmas 23%
• Scalability 20%
• Costs 19%
• Substrates 18%
• Temperature 10%

Physics & Astronomy

• methodology 63%
• sputtering 61%
• oxides 48%
• thin films 40%
• craters 29%
• gas flow 23%
• direct current 20%
• costs 19%
• solar cells 19%
• electrical properties 19%
• conduction 17%
• optical properties 16%
• room temperature 14%

Chemistry

• Sputtering 84%
• Oxide 42%
• Electroluminescence 27%
• Liquid Film 25%
• Optoelectronics 23%
• Solar Cell 22%
• Electrical Property 21%
• Optical Property 18%
• Surface 16%
• Plasma 16%
• Ambient Reaction Temperature 14%
• Time 9%
• Application 8%