TY - JOUR
T1 - -3000 V dc bias Ti oxidation by inductively coupled plasma
AU - Valencia-Alvarado, R.
AU - De La Piedad-Beneitez, A.
AU - De La Rosa-Vázquez, J.
AU - López-Callejas, R.
AU - Barocio, S. R.
AU - Mercado-Cabrera, A.
AU - Peña-Eguiluz, R.
AU - Muñoz-Castro, A. E.
PY - 2008
Y1 - 2008
N2 - Broadening the outer oxidized layer of titanium by means of plasmas commands considerable interest in the biomedical research area due to its potential in human biocompatibility enhancement. Some early results of titanium substrate superficial oxidation experiments which have been conducted in a cylindrical vessel inductively coupled to a 13.56 MHz RF generator with a 500 W output are presented. The oxidation process was carried out in a 20 % oxygen and 80 % argon mixture at work pressures in the 5×10-3-1 mbar range, while the samples were dc biased down to -3000 V. The substrate temperature appears to be directly dependent on this voltage, reaching 685°C at the maximum bias when a diffusive oxidation process gives rise to the TiO2 and α-TiO rutile phases. These were characterized by means of x-ray diffraction and scanning electron microscopy revealing atomic percentage concentrations of oxygen, with respect to those of titanium, between 68 and 13 at.%. The optimum modified layer depth reached 5 μm at a 5×10-2 mbar work pressure.
AB - Broadening the outer oxidized layer of titanium by means of plasmas commands considerable interest in the biomedical research area due to its potential in human biocompatibility enhancement. Some early results of titanium substrate superficial oxidation experiments which have been conducted in a cylindrical vessel inductively coupled to a 13.56 MHz RF generator with a 500 W output are presented. The oxidation process was carried out in a 20 % oxygen and 80 % argon mixture at work pressures in the 5×10-3-1 mbar range, while the samples were dc biased down to -3000 V. The substrate temperature appears to be directly dependent on this voltage, reaching 685°C at the maximum bias when a diffusive oxidation process gives rise to the TiO2 and α-TiO rutile phases. These were characterized by means of x-ray diffraction and scanning electron microscopy revealing atomic percentage concentrations of oxygen, with respect to those of titanium, between 68 and 13 at.%. The optimum modified layer depth reached 5 μm at a 5×10-2 mbar work pressure.
UR - http://www.scopus.com/inward/record.url?scp=70350679122&partnerID=8YFLogxK
U2 - 10.1088/0031-8949/2008/T131/014019
DO - 10.1088/0031-8949/2008/T131/014019
M3 - Artículo de la conferencia
AN - SCOPUS:70350679122
SN - 0281-1847
VL - T131
JO - Physica Scripta
JF - Physica Scripta
M1 - 014019
T2 - 12th Latin American Workshop on Plasma Physics
Y2 - 17 September 2007 through 21 September 2007
ER -