TY - JOUR
T1 - Two-objective metaheuristic optimization for floating gate transistor-based CMOS-MEMS inertial sensors
AU - Granados-Rojas, B.
AU - Reyes-Barranca, M. A.
AU - González-Navarro, Y. E.
AU - Abarca-Jiménez, G. S.
AU - Alemán-Arce, M. A.
AU - Mendoza-Acevedo, S.
AU - Flores-Nava, L. M.
N1 - Publisher Copyright:
© 2021, The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature.
PY - 2021/8
Y1 - 2021/8
N2 - In this work, a study case is presented in which the design of the layout for a CMOS sensor cell is partially automated by implementing a metaheuristic algorithm to find the best tradeoff between two conflicting objectives (two quantitative opposite and not totally independent yet desired performance or design qualities) among the set of feasible layout and electronic device configurations within a constricted search space. The feasibility of a solution (a particular configuration) and its capability to fulfill every requested objective, is determined by its compliance to the CMOS-MEMS design rules and fabrication process. Any given solution besides showing optimal or very near-to-the-optimal characteristics, must be suitable to be fabricated in the CMOS conventional process which for this case is a 0.5μm, 3-metal 2-poly N-well fabrication, beside this, since monolithic inertial sensors generally contains embedded movable electromechanical parts a surface micromachining must be considered. Simulation data and behavior of the bio-inspired metaheuristic algorithm used during the design process are presented, as well as electromechanical simulation results based the automatic-generated solutions.
AB - In this work, a study case is presented in which the design of the layout for a CMOS sensor cell is partially automated by implementing a metaheuristic algorithm to find the best tradeoff between two conflicting objectives (two quantitative opposite and not totally independent yet desired performance or design qualities) among the set of feasible layout and electronic device configurations within a constricted search space. The feasibility of a solution (a particular configuration) and its capability to fulfill every requested objective, is determined by its compliance to the CMOS-MEMS design rules and fabrication process. Any given solution besides showing optimal or very near-to-the-optimal characteristics, must be suitable to be fabricated in the CMOS conventional process which for this case is a 0.5μm, 3-metal 2-poly N-well fabrication, beside this, since monolithic inertial sensors generally contains embedded movable electromechanical parts a surface micromachining must be considered. Simulation data and behavior of the bio-inspired metaheuristic algorithm used during the design process are presented, as well as electromechanical simulation results based the automatic-generated solutions.
KW - CMOS-MEMS
KW - FGMOS
KW - Floating-gate
KW - Genetic algorithm
KW - MEMS
KW - Optimization
UR - http://www.scopus.com/inward/record.url?scp=85098781368&partnerID=8YFLogxK
U2 - 10.1007/s00542-020-05194-w
DO - 10.1007/s00542-020-05194-w
M3 - Artículo
AN - SCOPUS:85098781368
SN - 0946-7076
VL - 27
SP - 2889
EP - 2901
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 8
ER -