Synthesis and cathodoluminescence characterization of ZrO ₂:Er³⁺ films

Trivalent erbium doped zirconium oxide films were deposited by the ultrasonic spray pyrolysis technique. Films were deposited using zirconium tetrachloride octahydrate (ZrCl₄O·8H₂O) and erbium nitrate hexahydrate ((NO₃)₃Er·6H₂O) as precursors and deionized water as solvent. The dopant concentrations in the spray solution were 1, 3, 5, 10 and 15 at% in ratio to zirconium content. The films were deposited on corning glass substrates at different temperatures from 400 up to 550 °C. Films deposited at temperatures lower than 400 °C were amorphous, however, as substrate temperatures are increased, the ZrO ₂ films presented a better crystallinity and showed a tetragonal phase. Cathodoluminescence (CL) emission spectra showed bands centred at 524, 544 and 655 nm associated with the electronic transition of Er³⁺.