TY - JOUR
T1 - Oxygen implantation and diffusion in pure titanium by an rf inductively coupled plasma
AU - Valencia-Alvarado, R.
AU - de la Piedad-Beneitez, A.
AU - López-Callejas, R.
AU - Barocio, S. R.
AU - Mercado-Cabrera, A.
AU - Peña-Eguiluz, R.
AU - Muñoz-Castro, A. E.
AU - de la Rosa-Vázquez, J.
N1 - Funding Information:
This project has been partially funded by CONACyT, SEMARNAT and DGEST, Mexico. The authors are grateful to Dr. Manuel Espinoza and Mr. Jorge Pérez for their support in X-ray diffraction and EDS diagnostics. The technical assistance received from Pedro Ángeles, María Teresa Torres M. and Isaías Contreras is highly appreciated.
PY - 2009/5/1
Y1 - 2009/5/1
N2 - The superficial oxidation of pure titanium, 9 mm diameter, 5 mm thick disc samples by implantation and diffusion from inductively coupled plasmas is reported. Such rf plasmas were generated in a 15 l cylindrical Pyrex-like glass chamber containing pure circulating oxygen. A quarter wavelength solenoidal antenna capable of transmitting 500 W at 13.54 MHz was externally wound around the chamber and connected to an rf generator capable of up to 1200 W through an automatic matching network. The oxidation process was carried out for 6 h periods while varying the gas pressure between 1 × 102 and 5 × 10-1 Pa and the sample bias up to -3000 V DC. It was found that the sample temperature was a function both of the plasma density and the bias voltage. Without bias, the plasma heated the sample up to ∼200 °C, and with maximal bias voltage, the substrate was heated to 680 °C. At the latter temperature, the presence of the rutile phase was particularly evident in X-ray diffraction patterns. According to EDX data, the average oxygen to titanium ratio rose, from ∼0.06 for an untreated reference sample, to a ∼1.7 value for samples treated up to 680 °C.
AB - The superficial oxidation of pure titanium, 9 mm diameter, 5 mm thick disc samples by implantation and diffusion from inductively coupled plasmas is reported. Such rf plasmas were generated in a 15 l cylindrical Pyrex-like glass chamber containing pure circulating oxygen. A quarter wavelength solenoidal antenna capable of transmitting 500 W at 13.54 MHz was externally wound around the chamber and connected to an rf generator capable of up to 1200 W through an automatic matching network. The oxidation process was carried out for 6 h periods while varying the gas pressure between 1 × 102 and 5 × 10-1 Pa and the sample bias up to -3000 V DC. It was found that the sample temperature was a function both of the plasma density and the bias voltage. Without bias, the plasma heated the sample up to ∼200 °C, and with maximal bias voltage, the substrate was heated to 680 °C. At the latter temperature, the presence of the rutile phase was particularly evident in X-ray diffraction patterns. According to EDX data, the average oxygen to titanium ratio rose, from ∼0.06 for an untreated reference sample, to a ∼1.7 value for samples treated up to 680 °C.
KW - Biomaterials
KW - Inductively coupled plasma
KW - Oxygen ion implantation
KW - Titanium oxide
UR - http://www.scopus.com/inward/record.url?scp=67349165459&partnerID=8YFLogxK
U2 - 10.1016/j.vacuum.2009.01.078
DO - 10.1016/j.vacuum.2009.01.078
M3 - Artículo
SN - 0042-207X
VL - 83
SP - S264-S267
JO - Vacuum
JF - Vacuum
IS - SUPPL.1
ER -