TY - JOUR
T1 - High-resolution gas/odor sensors using high-frequency quartz crystal microbalance
AU - Muñoz-Aguirre, Severino
AU - López-Casique, Azucena
AU - Alcántara-Iniesta, Salvador
AU - Castillo-Mixcóatl, Juan
AU - Beltrán-Pérez, Georgina
AU - Muñoz-Aguirre, Narcizo
PY - 2014
Y1 - 2014
N2 - A study of gas/odor sensors fabricated with a 30 MHz quartz crystal microbalance (QCM) is presented. A problem that appears when working with high-frequency QCM sensors is that the quartz plate becomes thinner and fragile; therefore, the surface structure of the sensing film strongly affects the sensor performance. To solve this problem, thin sensing films were deposited by the ultrasonic atomizer technique. The sensor response to ethanol for different concentrations was stably measured, and a comparison with the response of 20 MHz QCM sensors was performed. It was found that the steady-state response was faster for the 30 MHz QCM sensor owing to the fact that the sensing film is thinner and the ethanol molecules can diffuse more quickly into the sensing film. Furthermore, a sensitivity improvement of approximately two times was achieved.
AB - A study of gas/odor sensors fabricated with a 30 MHz quartz crystal microbalance (QCM) is presented. A problem that appears when working with high-frequency QCM sensors is that the quartz plate becomes thinner and fragile; therefore, the surface structure of the sensing film strongly affects the sensor performance. To solve this problem, thin sensing films were deposited by the ultrasonic atomizer technique. The sensor response to ethanol for different concentrations was stably measured, and a comparison with the response of 20 MHz QCM sensors was performed. It was found that the steady-state response was faster for the 30 MHz QCM sensor owing to the fact that the sensing film is thinner and the ethanol molecules can diffuse more quickly into the sensing film. Furthermore, a sensitivity improvement of approximately two times was achieved.
KW - High frequency
KW - High sensitivity
KW - Odor sensor
KW - QCM
UR - http://www.scopus.com/inward/record.url?scp=84899512393&partnerID=8YFLogxK
M3 - Artículo
SN - 0914-4935
VL - 26
SP - 131
EP - 136
JO - Sensors and Materials
JF - Sensors and Materials
IS - 3
ER -