TY - JOUR
T1 - Fully solution-processed zinc oxide MIS capacitors by ultrasonic spray pyrolysis in air ambient
AU - Dominguez, Miguel A.
AU - Orduña-Diaz, Abdu
N1 - Publisher Copyright:
© 2017 Universidad Nacional Autónoma de México, Centro de Ciencias Aplicadas y Desarrollo Tecnológico
PY - 2017/6
Y1 - 2017/6
N2 - In this work, the fabrication and characterization of fully solution-processed zinc oxide metal–insulator–semiconductor (MIS) capacitors by ultrasonic spray pyrolysis (USP) are presented. Fluorine tin oxide by USP was used as transparent electrode, while spin-on glass by spin-coating was used as dielectric and zinc oxide by USP was used as active layer. Also, the zinc oxide film was characterized using photoluminescence spectroscopy, X-ray diffraction and Fourier transform infrared spectroscopy. The MIS capacitors were fabricated over glass slides and were highly transparent in the visible range, which makes their use feasible in transparent electronics. Employing capacitance–voltage and current–voltage measurements, the MIS capacitors were characterized.
AB - In this work, the fabrication and characterization of fully solution-processed zinc oxide metal–insulator–semiconductor (MIS) capacitors by ultrasonic spray pyrolysis (USP) are presented. Fluorine tin oxide by USP was used as transparent electrode, while spin-on glass by spin-coating was used as dielectric and zinc oxide by USP was used as active layer. Also, the zinc oxide film was characterized using photoluminescence spectroscopy, X-ray diffraction and Fourier transform infrared spectroscopy. The MIS capacitors were fabricated over glass slides and were highly transparent in the visible range, which makes their use feasible in transparent electronics. Employing capacitance–voltage and current–voltage measurements, the MIS capacitors were characterized.
KW - MIS capacitors
KW - Solution-processes
KW - Transparent electronics
UR - http://www.scopus.com/inward/record.url?scp=85020079911&partnerID=8YFLogxK
U2 - 10.1016/j.jart.2017.01.015
DO - 10.1016/j.jart.2017.01.015
M3 - Artículo
SN - 1665-6423
VL - 15
SP - 278
EP - 282
JO - Journal of Applied Research and Technology
JF - Journal of Applied Research and Technology
IS - 3
ER -