TY - JOUR
T1 - Effect of deposition parameters on structural, mechanical and electrochemical properties in Ti/TiN thin films on AISI 316L substrates produced by r. f. magnetron sputtering
AU - Domínguez-Crespo, M. A.
AU - Torres-Huerta, A. M.
AU - Rodríguez, E.
AU - González-Hernández, A.
AU - Brachetti-Sibaja, S. B.
AU - Dorantes-Rosales, H. J.
AU - López-Oyama, A. B.
N1 - Publisher Copyright:
© 2018 Elsevier B.V.
PY - 2018/5/25
Y1 - 2018/5/25
N2 - Synthesis of Ti/TiN hard coatings on different substrates has been the subject of several researchers in the last decades; however, a more compressive perspective is required for the investigation of the influence of deposition parameters depending on the substrate. This paper focus on evaluating tribological and electrochemical properties of Ti/TiN bilayered coatings deposited by r.f. magnetron sputtering on AISI 316L stainless steel substrates in 3.5 wt% NaCl solutions. Numerous factors can influence the electrochemical performance and tribological properties of the coatings; for this reason, the surface modifications through thickness, texturing and morphology were realized varying the sputtering parameters (substrate temperature, T, Power, P, target-to-substrate distance t-s, and Ar/N2 gas ratio). Ti/TiN films were composed of Ti, N, which are correlated with to Ti-N, Ti-O-N and O-Ti-O phases. The friction coefficient varies from 0.12 to 1.3 by the influence of the deposition parameters; the adhesion strength shows a cohesive failure indicating that in all samples coating adhesion to steel was high enough. The corrosion resistance of Ti/TiN bilayered coatings was correlated to both the Ti/TiN film densification and formation of O-Ti-O compounds.
AB - Synthesis of Ti/TiN hard coatings on different substrates has been the subject of several researchers in the last decades; however, a more compressive perspective is required for the investigation of the influence of deposition parameters depending on the substrate. This paper focus on evaluating tribological and electrochemical properties of Ti/TiN bilayered coatings deposited by r.f. magnetron sputtering on AISI 316L stainless steel substrates in 3.5 wt% NaCl solutions. Numerous factors can influence the electrochemical performance and tribological properties of the coatings; for this reason, the surface modifications through thickness, texturing and morphology were realized varying the sputtering parameters (substrate temperature, T, Power, P, target-to-substrate distance t-s, and Ar/N2 gas ratio). Ti/TiN films were composed of Ti, N, which are correlated with to Ti-N, Ti-O-N and O-Ti-O phases. The friction coefficient varies from 0.12 to 1.3 by the influence of the deposition parameters; the adhesion strength shows a cohesive failure indicating that in all samples coating adhesion to steel was high enough. The corrosion resistance of Ti/TiN bilayered coatings was correlated to both the Ti/TiN film densification and formation of O-Ti-O compounds.
KW - Electrochemical performance
KW - Hardness
KW - Microstructure
KW - Ti/TiN thin films
KW - XPS
UR - http://www.scopus.com/inward/record.url?scp=85042941995&partnerID=8YFLogxK
U2 - 10.1016/j.jallcom.2018.02.319
DO - 10.1016/j.jallcom.2018.02.319
M3 - Artículo
SN - 0925-8388
VL - 746
SP - 688
EP - 698
JO - Journal of Alloys and Compounds
JF - Journal of Alloys and Compounds
ER -