Design and simulation of a membranes-based acoustic sensors array for cochlear implant applications

In this work we present the design and simulation of an acoustic sensors array for detecting specific frequencies in a range, and allowing their identification from a complex audio signal in order to develop an application for cochlear implants. The sensitivity is obtained when a membrane resonates when stimulated by an audio signal which behaves as a mechanical wave. The structure of each sensor is designed with the concept of MEMS capacitive microphones, formed by a flexible membrane between two rigid backplates. The variation of the distance between the membrane and backplates generates a capacitance change that can pass to an electronic readout circuit. The structure has been designed as a massspring system where a set of springs, with the same elastic properties, holds the flexible membrane.