TY - GEN
T1 - Coating characterization in crn deposited by magnetron sputtering method on AISI 316 steel
AU - Hilerio, I.
AU - Vite, M.
AU - Moreno, M.
AU - Barron, M. A.
AU - Jiménez, H.
AU - Vazquez, B.
PY - 2009
Y1 - 2009
N2 - Chromium Nitride (CrN) thin films were deposited on AISI steel 316 substrates by means of the reactive magnetron sputtering method. CrN films were produced under two different conditions. In the first one, the substrate was heated by a DC source. For the second coating a negative substrate bias voltage was applied. X ray diffraction, quantitative energy dispersion and scanning electron microscope were employed to characterize the two different phases, their chemical composition as well as their microstructure. In addition, a microhardness test was carried out. The results show that a better phase formation of CrN thin films was achieved when a heating source was present (first case). Both coatings presented homogeneous surface. Their compositions show differences even when the gases flowing are the same in composition. Regarding to the hardness test results, there can be found a higher value when using a heating source.
AB - Chromium Nitride (CrN) thin films were deposited on AISI steel 316 substrates by means of the reactive magnetron sputtering method. CrN films were produced under two different conditions. In the first one, the substrate was heated by a DC source. For the second coating a negative substrate bias voltage was applied. X ray diffraction, quantitative energy dispersion and scanning electron microscope were employed to characterize the two different phases, their chemical composition as well as their microstructure. In addition, a microhardness test was carried out. The results show that a better phase formation of CrN thin films was achieved when a heating source was present (first case). Both coatings presented homogeneous surface. Their compositions show differences even when the gases flowing are the same in composition. Regarding to the hardness test results, there can be found a higher value when using a heating source.
UR - http://www.scopus.com/inward/record.url?scp=70149124476&partnerID=8YFLogxK
U2 - 10.1115/IMECE2008-67071
DO - 10.1115/IMECE2008-67071
M3 - Contribución a la conferencia
AN - SCOPUS:70149124476
SN - 9780791848685
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 129
EP - 133
BT - 2008 Proceedings of ASME International Mechanical Engineering Congress and Exposition, IMECE 2008
T2 - 2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008
Y2 - 31 October 2008 through 6 November 2008
ER -