TY - JOUR
T1 - Chemical composition and crystalline phases in F-doped tin oxide films grown by DC reactive sputtering
AU - Martel, A.
AU - Caballero-Briones, F.
AU - Iribarren, A.
AU - Castro-Rodríguez, R.
AU - Bartolo-Pérez, P.
AU - Peña, J. L.
PY - 2001/8/20
Y1 - 2001/8/20
N2 - We study by x-ray diffraction (XRD) the structural variations on a series of SnOx:F films grown by dc reactive sputtering from a metallic tin target in an Ar-O2-Freon plasma. We found that the films tend to be crystalline when the stoichiometry approaches to that of SnO or SnO2, being amorphous in between. We fitted the x-ray diffractograms and found that films are composed by a mixture of compounds, i.e. SnO, Sn3O4, Sn2O3 and SnO2, given by the simultaneous presence of Sn+2 and Sn+4. From the analysis of the deconvoluted areas under the x-ray diffractograms we calculate the Sn+2/Sn and Sn+4/Sn molar fraction present in the films. The same calculations are done for the x-ray photoelectron spectroscopy (XPS) results. By applying a combinatory model we fitted the general behavior of SnOx films with different oxygen content versus the Sn+2/Sn and Sn+4/Sn molar fraction. Both XRD and XPS results are compared with the theoretical curve, showing a well agreement.
AB - We study by x-ray diffraction (XRD) the structural variations on a series of SnOx:F films grown by dc reactive sputtering from a metallic tin target in an Ar-O2-Freon plasma. We found that the films tend to be crystalline when the stoichiometry approaches to that of SnO or SnO2, being amorphous in between. We fitted the x-ray diffractograms and found that films are composed by a mixture of compounds, i.e. SnO, Sn3O4, Sn2O3 and SnO2, given by the simultaneous presence of Sn+2 and Sn+4. From the analysis of the deconvoluted areas under the x-ray diffractograms we calculate the Sn+2/Sn and Sn+4/Sn molar fraction present in the films. The same calculations are done for the x-ray photoelectron spectroscopy (XPS) results. By applying a combinatory model we fitted the general behavior of SnOx films with different oxygen content versus the Sn+2/Sn and Sn+4/Sn molar fraction. Both XRD and XPS results are compared with the theoretical curve, showing a well agreement.
UR - http://www.scopus.com/inward/record.url?scp=0035921491&partnerID=8YFLogxK
U2 - 10.1142/s0217984901002178
DO - 10.1142/s0217984901002178
M3 - Artículo
AN - SCOPUS:0035921491
SN - 0217-9849
VL - 15
SP - 634
EP - 638
JO - Modern Physics Letters B
JF - Modern Physics Letters B
IS - 17-19
ER -