TY - JOUR
T1 - Alumina layer using low-cost direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) on AISI 1018 steel
AU - Pérez, Javier Serrano
AU - López, Fernando Juárez
AU - Pérez, Edgar Serrano
N1 - Publisher Copyright:
© 2020 Universidad Nacional Autonoma de Mexico. All rights reserved.
PY - 2020/6
Y1 - 2020/6
N2 - Amorphous alumina layers were deposited on low carbon steel (AISI 1018) substrates by the direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) technique. For the DLI-MOCVD technique, two temperatures were used: a vaporization chamber temperature of 180 °C and a reaction chamber temperature of 370 °C. Liquid precursor aluminum tri-sec-butoxide was introduced in form of atomized liquid, each pulse of 1 Hz frequency and 3 ms opening time, the solution was pressurized at 40 psi under inert Argon atmosphere. 200 sccm of Argon were used as continuous carrier gas during all the deposition process. Microscopy and XRD techniques were used to characterize the deposited material. The thickness of the alumina coatings was of 100 µm, approximately.
AB - Amorphous alumina layers were deposited on low carbon steel (AISI 1018) substrates by the direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) technique. For the DLI-MOCVD technique, two temperatures were used: a vaporization chamber temperature of 180 °C and a reaction chamber temperature of 370 °C. Liquid precursor aluminum tri-sec-butoxide was introduced in form of atomized liquid, each pulse of 1 Hz frequency and 3 ms opening time, the solution was pressurized at 40 psi under inert Argon atmosphere. 200 sccm of Argon were used as continuous carrier gas during all the deposition process. Microscopy and XRD techniques were used to characterize the deposited material. The thickness of the alumina coatings was of 100 µm, approximately.
KW - Alumina
KW - Direct liquid injection
KW - MOC-CVD
UR - http://www.scopus.com/inward/record.url?scp=85093905741&partnerID=8YFLogxK
U2 - 10.22201/ICAT.24486736E.2020.18.3.1086
DO - 10.22201/ICAT.24486736E.2020.18.3.1086
M3 - Artículo
AN - SCOPUS:85093905741
SN - 1665-6423
VL - 18
SP - 95
EP - 100
JO - Journal of Applied Research and Technology
JF - Journal of Applied Research and Technology
IS - 3
ER -