TY - JOUR
T1 - Thermoacoustic and thermoreflectance imaging of biased integrated circuits
T2 - Voltage and temperature maps
AU - Hernández-Rosales, E.
AU - Cedeño, E.
AU - Hernandez-Wong, J.
AU - Rojas-Trigos, J. B.
AU - Marin, E.
AU - Gandra, F. C.G.
AU - Mansanares, A. M.
N1 - Publisher Copyright:
© 2016 Author(s).
PY - 2016/7/25
Y1 - 2016/7/25
N2 - In this work a combined thermoacoustic and thermoreflectance set-up was designed for imaging biased microelectronic circuits. In particular, it was used with polycrystalline silicon resistive tracks grown on a monocrystalline Si substrate mounted on a test chip. Thermoreflectance images, obtained by scanning a probe laser beam on the sample surface, clearly show the regions periodically heated by Joule effect, which are associated to the electric current distribution in the circuit. The thermoacoustic signal, detected by a pyroelectric/piezoelectric sensor beneath the chip, also discloses the Joule contribution of the whole sample. However, additional information emerges when a non-modulated laser beam is focused on the sample surface in a raster scan mode allowing imaging of the sample. The distribution of this supplementary signal is related to the voltage distribution along the circuit.
AB - In this work a combined thermoacoustic and thermoreflectance set-up was designed for imaging biased microelectronic circuits. In particular, it was used with polycrystalline silicon resistive tracks grown on a monocrystalline Si substrate mounted on a test chip. Thermoreflectance images, obtained by scanning a probe laser beam on the sample surface, clearly show the regions periodically heated by Joule effect, which are associated to the electric current distribution in the circuit. The thermoacoustic signal, detected by a pyroelectric/piezoelectric sensor beneath the chip, also discloses the Joule contribution of the whole sample. However, additional information emerges when a non-modulated laser beam is focused on the sample surface in a raster scan mode allowing imaging of the sample. The distribution of this supplementary signal is related to the voltage distribution along the circuit.
UR - http://www.scopus.com/inward/record.url?scp=84980034378&partnerID=8YFLogxK
U2 - 10.1063/1.4959828
DO - 10.1063/1.4959828
M3 - Artículo
SN - 0003-6951
VL - 109
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 4
M1 - 041902
ER -