Theoretical modelling of oxide thin film growth by pulsed laser sources

J. L. Jiménez Pérez, P. H. Sakanaka, M. A. Algatti, J. G. Mendoza-Alvarez, A. Cruz Orea

Research output: Contribution to journalArticle

Abstract

This paper considers theoretical modelling and experimental investigation of TiO2 film growth on Ti films previously deposited on glass substrates. The Ti oxidation occurs due to film surface heating by a moving beam of a pulsed Nd: YAG laser that sweeps the surface at a constant speed of 2 mm/s, under atmospheric environment. The model takes into account the self-consistent solutions of the three-dimensional heat diffusion and oxidation rate equations. Numerical results obtained for 100 and 200 pulses of 290 ns and 3.17 MW/cm2 with a repetition frequency of 100 and 200 Hz, showed that maximum temperatures of approximately 850 and 1200 K are reached after the action of the fiftieth pulse. The occurrence of surface cooling between two consecutive pulses is observed up to the repetition frequency of 100 Hz, and the surface temperature and the film thickness profiles closely match the Gaussian shape of the spatial laser beam profile. This strongly indicates that heat diffusion may be neglected during the laser pulse duration. Theoretical predictions for the TiO2 film thickness dependence on laser intensity are in close agreement with the experimental data in the range between 2.4 and 3.2 MW/cm2.
Original languageAmerican English
Pages (from-to)793-798
Number of pages713
JournalPhysica Status Solidi (B) Basic Research
DOIs
StatePublished - 1 Jan 2000
Externally publishedYes

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Film growth
Pulsed lasers
Oxides
Oxide films
pulsed lasers
Lasers
Thin films
oxides
repetition
film thickness
Growth
thin films
Hot Temperature
pulses
surface cooling
Film thickness
heat
oxidation
Temperature
Solid-State Lasers

Cite this

Jiménez Pérez, J. L. ; Sakanaka, P. H. ; Algatti, M. A. ; Mendoza-Alvarez, J. G. ; Cruz Orea, A. / Theoretical modelling of oxide thin film growth by pulsed laser sources. In: Physica Status Solidi (B) Basic Research. 2000 ; pp. 793-798.
@article{bc3737190737474397b545b36f796c9e,
title = "Theoretical modelling of oxide thin film growth by pulsed laser sources",
abstract = "This paper considers theoretical modelling and experimental investigation of TiO2 film growth on Ti films previously deposited on glass substrates. The Ti oxidation occurs due to film surface heating by a moving beam of a pulsed Nd: YAG laser that sweeps the surface at a constant speed of 2 mm/s, under atmospheric environment. The model takes into account the self-consistent solutions of the three-dimensional heat diffusion and oxidation rate equations. Numerical results obtained for 100 and 200 pulses of 290 ns and 3.17 MW/cm2 with a repetition frequency of 100 and 200 Hz, showed that maximum temperatures of approximately 850 and 1200 K are reached after the action of the fiftieth pulse. The occurrence of surface cooling between two consecutive pulses is observed up to the repetition frequency of 100 Hz, and the surface temperature and the film thickness profiles closely match the Gaussian shape of the spatial laser beam profile. This strongly indicates that heat diffusion may be neglected during the laser pulse duration. Theoretical predictions for the TiO2 film thickness dependence on laser intensity are in close agreement with the experimental data in the range between 2.4 and 3.2 MW/cm2.",
author = "{Jim{\'e}nez P{\'e}rez}, {J. L.} and Sakanaka, {P. H.} and Algatti, {M. A.} and Mendoza-Alvarez, {J. G.} and {Cruz Orea}, A.",
year = "2000",
month = "1",
day = "1",
doi = "10.1002/1521-3951(200007)220:1<793::AID-PSSB793>3.0.CO;2-1",
language = "American English",
pages = "793--798",
journal = "Physica Status Solidi (B) Basic Research",
issn = "0370-1972",
publisher = "Wiley-VCH Verlag",

}

Theoretical modelling of oxide thin film growth by pulsed laser sources. / Jiménez Pérez, J. L.; Sakanaka, P. H.; Algatti, M. A.; Mendoza-Alvarez, J. G.; Cruz Orea, A.

In: Physica Status Solidi (B) Basic Research, 01.01.2000, p. 793-798.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Theoretical modelling of oxide thin film growth by pulsed laser sources

AU - Jiménez Pérez, J. L.

AU - Sakanaka, P. H.

AU - Algatti, M. A.

AU - Mendoza-Alvarez, J. G.

AU - Cruz Orea, A.

PY - 2000/1/1

Y1 - 2000/1/1

N2 - This paper considers theoretical modelling and experimental investigation of TiO2 film growth on Ti films previously deposited on glass substrates. The Ti oxidation occurs due to film surface heating by a moving beam of a pulsed Nd: YAG laser that sweeps the surface at a constant speed of 2 mm/s, under atmospheric environment. The model takes into account the self-consistent solutions of the three-dimensional heat diffusion and oxidation rate equations. Numerical results obtained for 100 and 200 pulses of 290 ns and 3.17 MW/cm2 with a repetition frequency of 100 and 200 Hz, showed that maximum temperatures of approximately 850 and 1200 K are reached after the action of the fiftieth pulse. The occurrence of surface cooling between two consecutive pulses is observed up to the repetition frequency of 100 Hz, and the surface temperature and the film thickness profiles closely match the Gaussian shape of the spatial laser beam profile. This strongly indicates that heat diffusion may be neglected during the laser pulse duration. Theoretical predictions for the TiO2 film thickness dependence on laser intensity are in close agreement with the experimental data in the range between 2.4 and 3.2 MW/cm2.

AB - This paper considers theoretical modelling and experimental investigation of TiO2 film growth on Ti films previously deposited on glass substrates. The Ti oxidation occurs due to film surface heating by a moving beam of a pulsed Nd: YAG laser that sweeps the surface at a constant speed of 2 mm/s, under atmospheric environment. The model takes into account the self-consistent solutions of the three-dimensional heat diffusion and oxidation rate equations. Numerical results obtained for 100 and 200 pulses of 290 ns and 3.17 MW/cm2 with a repetition frequency of 100 and 200 Hz, showed that maximum temperatures of approximately 850 and 1200 K are reached after the action of the fiftieth pulse. The occurrence of surface cooling between two consecutive pulses is observed up to the repetition frequency of 100 Hz, and the surface temperature and the film thickness profiles closely match the Gaussian shape of the spatial laser beam profile. This strongly indicates that heat diffusion may be neglected during the laser pulse duration. Theoretical predictions for the TiO2 film thickness dependence on laser intensity are in close agreement with the experimental data in the range between 2.4 and 3.2 MW/cm2.

UR - https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=0034215304&origin=inward

UR - https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=0034215304&origin=inward

U2 - 10.1002/1521-3951(200007)220:1<793::AID-PSSB793>3.0.CO;2-1

DO - 10.1002/1521-3951(200007)220:1<793::AID-PSSB793>3.0.CO;2-1

M3 - Article

SP - 793

EP - 798

JO - Physica Status Solidi (B) Basic Research

JF - Physica Status Solidi (B) Basic Research

SN - 0370-1972

ER -