Structural studies of ZnS thin films grown on GaAs by RF magnetron sputtering

V. L. Gayou, B. Salazar-Hernandez, M. E. Constantino, E. Rosendo Andrés, T. Díaz, R. Delgado Macuil, M. Rojas López

Research output: Contribution to journalArticlepeer-review

52 Scopus citations

Abstract

X-ray diffraction (XRD) studies of ZnS thin films grown on GaAs (001) substrates at different temperatures by rf magnetron sputtering have been carried out using CuKα radiation. XRD analysis reveals that deposited films below 335 °C, assumed the zinc blend structure. Samples annealed at above 335 °C showed mixed phases of the zinc blend and wurzite structures. Information about crystallite size is obtained from (001), (111) and (104) diffraction peaks. The average crystallite size of the film was determined to be ∼ 32 nm using the Scherrer formula.

Original languageEnglish
Pages (from-to)1191-1194
Number of pages4
JournalVacuum
Volume84
Issue number10
DOIs
StatePublished - 19 May 2010

Keywords

  • AFM
  • Nanoparticles
  • Sputtering
  • XRD
  • ZnS

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