TY - JOUR
T1 - Photonic gaps of aluminium-nitride film related with structure and deposition
AU - Escamilla, Conett Huerta
AU - Lara, Fabio Chale
AU - Xiao, Mufei
N1 - Funding Information:
The authors thank Oscar Edel Contreras for fruitful discussions. The authors acknowledge technical assistances from Fabian Alonso, Javier Camacho and Alma Georgina Navarrete Alcalá. The work is partially supported by PAPIIT IN100710-3.
PY - 2011/2/10
Y1 - 2011/2/10
N2 - Work is reported on the characterizations of pulsed laser deposited aluminum-nitride thin films. The films were deposited on silicon substrate with a KrF 248 nm pulse laser operating in a Riber LDM-22 system. Optical reflection spectroscopy (400-900 nm) was carried out, which revealed that, under certain deposition conditions, the films could show strong periodic spectra with reflection gaps of about 50-100 nm in width. The microscopic structures, such as crystalline status and element composition, were also investigated with Auger electron spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, and profilometry etc. Relations between the optical responses and the microscopic structures were established. The foundations underlying the relations were studied and discussed.
AB - Work is reported on the characterizations of pulsed laser deposited aluminum-nitride thin films. The films were deposited on silicon substrate with a KrF 248 nm pulse laser operating in a Riber LDM-22 system. Optical reflection spectroscopy (400-900 nm) was carried out, which revealed that, under certain deposition conditions, the films could show strong periodic spectra with reflection gaps of about 50-100 nm in width. The microscopic structures, such as crystalline status and element composition, were also investigated with Auger electron spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, and profilometry etc. Relations between the optical responses and the microscopic structures were established. The foundations underlying the relations were studied and discussed.
KW - AlN thin films
KW - laser ablation
KW - optical reflection spectroscopy
UR - http://www.scopus.com/inward/record.url?scp=79953898869&partnerID=8YFLogxK
U2 - 10.1142/S0217979211058183
DO - 10.1142/S0217979211058183
M3 - Artículo
SN - 0217-9792
VL - 25
SP - 487
EP - 497
JO - International Journal of Modern Physics B
JF - International Journal of Modern Physics B
IS - 4
ER -