Optical properties of nanocrystalline La2O3 dielectric films deposited by radio frequency magnetron sputtering

S. B. Brachetti-Sibaja; S. E. Rodil; M. A. Domínguez-Crespo; A. M. Torres-Huerta; E. Rodríguez; A. B. López-Oyama

doi:10.1016/j.tsf.2017.07.010

Optical properties of nanocrystalline La₂O₃ dielectric films deposited by radio frequency magnetron sputtering

S. B. Brachetti-Sibaja, S. E. Rodil, M. A. Domínguez-Crespo, A. M. Torres-Huerta, E. Rodríguez, A. B. López-Oyama

Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada (CICATA), Unidad Altamira

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

La₂O₃ thin films were successfully synthesized by r. f. magnetron sputtering technique. The effect of power, deposition time and substrate temperature on the formation and optical properties of the films was investigated. X-ray diffraction (XRD) studies revealed the formation of hexagonal phased La₂O₃ thin films. The influence of sputtering parameters on chemical composition and surface species was studied by X-ray photoelectron spectroscopy (XPS). The optical properties were investigated in the wavelength range of 200–1100 nm. The samples were modelled as a three-phase optical model. Optical constants were calculated at 2 eV from classical dispersion model based on the single Lorentz for dielectric materials.

Original language	English
Pages (from-to)	615-621
Number of pages	7
Journal	Thin Solid Films
Volume	636
DOIs	https://doi.org/10.1016/j.tsf.2017.07.010
State	Published - 31 Aug 2017

Keywords

Lanthanum hydroxide
Lanthanum oxide
Optical properties
Sputtering
Swanepoel method
Thin films

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10.1016/j.tsf.2017.07.010

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title = "Optical properties of nanocrystalline La2O3 dielectric films deposited by radio frequency magnetron sputtering",

abstract = "La2O3 thin films were successfully synthesized by r. f. magnetron sputtering technique. The effect of power, deposition time and substrate temperature on the formation and optical properties of the films was investigated. X-ray diffraction (XRD) studies revealed the formation of hexagonal phased La2O3 thin films. The influence of sputtering parameters on chemical composition and surface species was studied by X-ray photoelectron spectroscopy (XPS). The optical properties were investigated in the wavelength range of 200–1100 nm. The samples were modelled as a three-phase optical model. Optical constants were calculated at 2 eV from classical dispersion model based on the single Lorentz for dielectric materials.",

keywords = "Lanthanum hydroxide, Lanthanum oxide, Optical properties, Sputtering, Swanepoel method, Thin films",

author = "Brachetti-Sibaja, {S. B.} and Rodil, {S. E.} and Dom{\'i}nguez-Crespo, {M. A.} and Torres-Huerta, {A. M.} and E. Rodr{\'i}guez and L{\'o}pez-Oyama, {A. B.}",

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year = "2017",

month = aug,

day = "31",

doi = "10.1016/j.tsf.2017.07.010",

language = "Ingl{\'e}s",

volume = "636",

pages = "615--621",

journal = "Thin Solid Films",

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TY - JOUR

T1 - Optical properties of nanocrystalline La2O3 dielectric films deposited by radio frequency magnetron sputtering

AU - Brachetti-Sibaja, S. B.

AU - Rodil, S. E.

AU - Domínguez-Crespo, M. A.

AU - Torres-Huerta, A. M.

AU - Rodríguez, E.

AU - López-Oyama, A. B.

PY - 2017/8/31

Y1 - 2017/8/31

N2 - La2O3 thin films were successfully synthesized by r. f. magnetron sputtering technique. The effect of power, deposition time and substrate temperature on the formation and optical properties of the films was investigated. X-ray diffraction (XRD) studies revealed the formation of hexagonal phased La2O3 thin films. The influence of sputtering parameters on chemical composition and surface species was studied by X-ray photoelectron spectroscopy (XPS). The optical properties were investigated in the wavelength range of 200–1100 nm. The samples were modelled as a three-phase optical model. Optical constants were calculated at 2 eV from classical dispersion model based on the single Lorentz for dielectric materials.

AB - La2O3 thin films were successfully synthesized by r. f. magnetron sputtering technique. The effect of power, deposition time and substrate temperature on the formation and optical properties of the films was investigated. X-ray diffraction (XRD) studies revealed the formation of hexagonal phased La2O3 thin films. The influence of sputtering parameters on chemical composition and surface species was studied by X-ray photoelectron spectroscopy (XPS). The optical properties were investigated in the wavelength range of 200–1100 nm. The samples were modelled as a three-phase optical model. Optical constants were calculated at 2 eV from classical dispersion model based on the single Lorentz for dielectric materials.

KW - Lanthanum hydroxide

KW - Lanthanum oxide

KW - Optical properties

KW - Sputtering

KW - Swanepoel method

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=85022230676&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2017.07.010

DO - 10.1016/j.tsf.2017.07.010

M3 - Artículo

SN - 0040-6090

VL - 636

SP - 615

EP - 621

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Optical properties of nanocrystalline La₂O₃ dielectric films deposited by radio frequency magnetron sputtering

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Keywords

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