Modal analysis of a structure used as a capacitive MEMS accelerometer sensor

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Abstract

In this paper a modal analysis for a proposed capacitive MEMS accelerometer sensor that can be used as inclinometer, dynamic acceleration or vibration sensor, is shown. An analysis of the effect of frequency over the displacement of the movable electrode is made. Besides, it is shown that the natural frequencies and vibration modes depend on the application given to this capacitive sensor. Additionally, the structure here proposed can be manufactured using standard CMOS technology. This paper shows how the same capacitive structure can be used in a MEMS sensor no matter what type of application you will provide. A model of the accelerometer is presented. The simulations shown were obtained using COMSOL.

Original languageEnglish
Title of host publication2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479962310
DOIs
StatePublished - 2014
Event2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2014 - Ciudad del Carmen, Mexico
Duration: 29 Sep 20143 Oct 2014

Publication series

Name2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2014

Conference

Conference2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2014
Country/TerritoryMexico
CityCiudad del Carmen
Period29/09/143/10/14

Keywords

  • CMOS
  • Capacitive MEMS accelerometer
  • Dynamic acceleration
  • Inclinometer
  • Modal analysis
  • Vibration sensor

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