TY - GEN
T1 - Modal analysis of a structure used as a capacitive MEMS accelerometer sensor
AU - Abarca-Jiménez, G. S.
AU - Reyes-Barranca, M. A.
AU - Mendoza-Acevedo, S.
AU - Munguía-Cervantes, J. E.
AU - Alemán-Arce, M. A.
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014
Y1 - 2014
N2 - In this paper a modal analysis for a proposed capacitive MEMS accelerometer sensor that can be used as inclinometer, dynamic acceleration or vibration sensor, is shown. An analysis of the effect of frequency over the displacement of the movable electrode is made. Besides, it is shown that the natural frequencies and vibration modes depend on the application given to this capacitive sensor. Additionally, the structure here proposed can be manufactured using standard CMOS technology. This paper shows how the same capacitive structure can be used in a MEMS sensor no matter what type of application you will provide. A model of the accelerometer is presented. The simulations shown were obtained using COMSOL.
AB - In this paper a modal analysis for a proposed capacitive MEMS accelerometer sensor that can be used as inclinometer, dynamic acceleration or vibration sensor, is shown. An analysis of the effect of frequency over the displacement of the movable electrode is made. Besides, it is shown that the natural frequencies and vibration modes depend on the application given to this capacitive sensor. Additionally, the structure here proposed can be manufactured using standard CMOS technology. This paper shows how the same capacitive structure can be used in a MEMS sensor no matter what type of application you will provide. A model of the accelerometer is presented. The simulations shown were obtained using COMSOL.
KW - CMOS
KW - Capacitive MEMS accelerometer
KW - Dynamic acceleration
KW - Inclinometer
KW - Modal analysis
KW - Vibration sensor
UR - http://www.scopus.com/inward/record.url?scp=84938801806&partnerID=8YFLogxK
U2 - 10.1109/ICEEE.2014.6978263
DO - 10.1109/ICEEE.2014.6978263
M3 - Contribución a la conferencia
AN - SCOPUS:84938801806
T3 - 2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2014
BT - 2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2014
Y2 - 29 September 2014 through 3 October 2014
ER -