Mechanical-spring model on ZnO submicron rods for a steady response on vertically integrated nanogenerators at multiple harvesting frequencies

O. G. Súchil, S. Capula-Colindres, H. Báez-Medina, A. Martinez-Rivas, G. Teran, Marco A. Ramírez-Salinas

Research output: Contribution to journalArticle

Abstract

We have studied the uniaxial compression of ZnO submicron rods grown hydrothermally over Si/Cr/Au and Si/Al substrates such as mechanical springs. We used FEM simulations to find the oscillation frequency range at which the submicron rods deliver the steadiest piezopotential independently of the frequency they oscillate. A stationary and a harmonic spring-mass model were implemented for a single and multiple submicron rods. We measured dimensions and submicron rods/μm2 with our SEM/FIB image analysis. Nanoindentation was used to extract the spring constant and the Young's Modulus of the submicron rods. The steadiest piezopotentials (±3.72, ±5.16 μV) were obtained below 500 kHz. The methodology described can be helpful to design multi-frequency nanogerators.

Original languageEnglish
Article number111199
JournalMicroelectronic Engineering
Volume222
DOIs
StatePublished - 1 Feb 2020

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Nanoindentation
Image analysis
rods
Elastic moduli
Finite element method
Scanning electron microscopy
Substrates
nanoindentation
image analysis
modulus of elasticity
frequency ranges
methodology
harmonics
oscillations
scanning electron microscopy
simulation

Keywords

  • FIB
  • Nanoindentation
  • SEM
  • Submicron rods
  • ZnO

Cite this

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abstract = "We have studied the uniaxial compression of ZnO submicron rods grown hydrothermally over Si/Cr/Au and Si/Al substrates such as mechanical springs. We used FEM simulations to find the oscillation frequency range at which the submicron rods deliver the steadiest piezopotential independently of the frequency they oscillate. A stationary and a harmonic spring-mass model were implemented for a single and multiple submicron rods. We measured dimensions and submicron rods/μm2 with our SEM/FIB image analysis. Nanoindentation was used to extract the spring constant and the Young's Modulus of the submicron rods. The steadiest piezopotentials (±3.72, ±5.16 μV) were obtained below 500 kHz. The methodology described can be helpful to design multi-frequency nanogerators.",
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AU - Súchil, O. G.

AU - Capula-Colindres, S.

AU - Báez-Medina, H.

AU - Martinez-Rivas, A.

AU - Teran, G.

AU - Ramírez-Salinas, Marco A.

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AB - We have studied the uniaxial compression of ZnO submicron rods grown hydrothermally over Si/Cr/Au and Si/Al substrates such as mechanical springs. We used FEM simulations to find the oscillation frequency range at which the submicron rods deliver the steadiest piezopotential independently of the frequency they oscillate. A stationary and a harmonic spring-mass model were implemented for a single and multiple submicron rods. We measured dimensions and submicron rods/μm2 with our SEM/FIB image analysis. Nanoindentation was used to extract the spring constant and the Young's Modulus of the submicron rods. The steadiest piezopotentials (±3.72, ±5.16 μV) were obtained below 500 kHz. The methodology described can be helpful to design multi-frequency nanogerators.

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