TY - JOUR
T1 - Mathematical model of Boltzmann's sigmoidal equation applicable to the set-up of the RF-magnetron co-sputtering in thin films deposition of BaxSr1-xTiO3
AU - Reséndiz-Muñoz, J.
AU - Corona-Rivera, M. A.
AU - Fernández-Muñoz, J. L.
AU - Zapata-Torres, M.
AU - Márquez-Herrera, A.
AU - Ovando-Medina, V. M.
N1 - Publisher Copyright:
© 2017 Indian Academy of Sciences.
PY - 2017/9
Y1 - 2017/9
N2 - In this work, we present the stoichiometric behaviour of Ba2+ and Sr2+ when they are deposited to make a solid solution of barium strontium titanate. BaxSr1-xTiO3 (BST) thin films of nanometric order on a quartz substrate were obtained by means of in-situ RF-magnetron co-sputtering at 495°C temperature, applying a total power of 120 W divided into intervals of 15 W that was distributed between two magnetron sputtering cathodes containing targets of BaTiO3 and SrTiO3, as follows: 0-120, 15-105, 30-90, 45-75, 60-60, 75-45, 90-30, 105-15 and 120-0 W. Boltzmann's sigmoidal modified equation (Boltzmann's profile) is proposed to explain the behaviour and the deposition ratio Ba/Sr of the BST as a function of the RF-magnetron power. The Boltzmann's profile proposal shows concordance with experimental data of deposits of BST on substrates of nichrome under the same experimental conditions, showing differences in the ratio Ba/Sr of the BST due to the influence of the substrate.
AB - In this work, we present the stoichiometric behaviour of Ba2+ and Sr2+ when they are deposited to make a solid solution of barium strontium titanate. BaxSr1-xTiO3 (BST) thin films of nanometric order on a quartz substrate were obtained by means of in-situ RF-magnetron co-sputtering at 495°C temperature, applying a total power of 120 W divided into intervals of 15 W that was distributed between two magnetron sputtering cathodes containing targets of BaTiO3 and SrTiO3, as follows: 0-120, 15-105, 30-90, 45-75, 60-60, 75-45, 90-30, 105-15 and 120-0 W. Boltzmann's sigmoidal modified equation (Boltzmann's profile) is proposed to explain the behaviour and the deposition ratio Ba/Sr of the BST as a function of the RF-magnetron power. The Boltzmann's profile proposal shows concordance with experimental data of deposits of BST on substrates of nichrome under the same experimental conditions, showing differences in the ratio Ba/Sr of the BST due to the influence of the substrate.
KW - Barium strontium titanate
KW - Boltzmann's equation.
KW - Sputtering deposition
KW - Stoichiometric behaviour
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85029091402&partnerID=8YFLogxK
U2 - 10.1007/s12034-017-1441-x
DO - 10.1007/s12034-017-1441-x
M3 - Artículo
SN - 0250-4707
VL - 40
SP - 1043
EP - 1047
JO - Bulletin of Materials Science
JF - Bulletin of Materials Science
IS - 5
ER -