Abstract
Manganese oxide thin-films for current-signal sensing and thermal insulation were synthesized by high-vacuum evaporation and thermal oxidation processes at low-temperature conditions. Structure-formation of the films with orthorhombic-partial structure of MnO2/Mn2O3 was investigated by X-ray diffraction. Raman studies have demonstrated that thermal properties can be influenced by the symmetry of the Mn-O bonds and it associated with the dynamic Jahn-Teller distortion. Dynamic behavior of samples as a function of the frequency response to verify their performance as signal sensors was evaluated by resistive-inductive circuit (RL circuit). To demonstrate the thermal capability of samples from current-voltage (I-V) characteristics, a Schottky emission model was used.
Original language | English |
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Pages (from-to) | 1280-1284 |
Number of pages | 5 |
Journal | Materials Science in Semiconductor Processing |
Volume | 16 |
Issue number | 5 |
DOIs | |
State | Published - 2013 |
Keywords
- Current-signal sensing
- Manganese oxide
- Thermal capability
- Thermal oxidation
- Thin-films