TY - JOUR
T1 - IMPACT
T2 - A facility to study the interaction of low-energy intense particle beams with dynamic heterogeneous surfaces
AU - Allain, J. P.
AU - Nieto, M.
AU - Hendricks, M. R.
AU - Plotkin, P.
AU - Harilal, S. S.
AU - Hassanein, A.
N1 - Funding Information:
We would first like to thank the referees for valuable comments to this manuscript. We would like to especially thank V. Titov and W. Klimowych for work in PRIME facility. We would like to thank our Science Undergraduate Laboratory Internships (SULI) students partly sponsored by the Department of Energy: S. Taj, D. Rokusek, C. Chrobak, E. Hinson, W. Lytle, H. Nomanbhai, M. Hull, and D. Detert. We acknowledge the work of Ph.D. student M. van der Velden of TU Eindhoven for work on threshold sputtering in collaboration with ASML. We would also like to thank our collaborators in EUV lithography work [Philips Research Laboratories in Aachen, Fraunhofer Institut in Aachen, ASML, Xtreme Technologies, NIST-SURF facility, O. Auciello at Argonne National Laboratory (ANL), A. Macrander, and the OFM-APS team at ANL] and work in fusion materials science (R. Majeski and R. Kaita at PPPL, R. Bastasz at SNLL, and R. Doerner at UCSD). We thank A. Egbert of Phoenix EUV for providing EUV source performance data. This manuscript has been created in part by Uchicago Argonne, LLC, Operator of Argonne National Laboratory (“Argonne”). Argonne, a U.S. Department of Energy Office of Science Laboratory, is operated Under Contract No. DE-AC02-06CH11357.
PY - 2007
Y1 - 2007
N2 - The Interaction of Materials with Particles and Components Testing (IMPACT) experimental facility is furnished with multiple ion sources and in situ diagnostics to study the modification of surfaces undergoing physical, chemical, and electronic changes during exposure to energetic particle beams. Ion beams with energies in the range between 20 and 5000 eV can bombard samples at flux levels in the range of 1010 - 1015 cm-2 s-1; parameters such as ion angle of incidence and exposed area are also controllable during the experiment. IMPACT has diagnostics that allow full characterization of the beam, including a Faraday cup, a beam imaging system, and a retarding field energy analyzer. IMPACT is equipped with multiple diagnostics, such as electron (Auger, photoelectron) and ion scattering spectroscopies that allow different probing depths of the sample to monitor compositional changes in multicomponent and/or layered targets. A unique real-time erosion diagnostic based on a dual quartz crystal microbalance measures deposition from an eroding surface with rates smaller than 0.01 nms, which can be converted to a sputter yield measurement. The monitoring crystal can be rotated and placed in the target position so that the deposited material on the quartz crystal oscillator surface can be characterized without transfer outside of the vacuum chamber.
AB - The Interaction of Materials with Particles and Components Testing (IMPACT) experimental facility is furnished with multiple ion sources and in situ diagnostics to study the modification of surfaces undergoing physical, chemical, and electronic changes during exposure to energetic particle beams. Ion beams with energies in the range between 20 and 5000 eV can bombard samples at flux levels in the range of 1010 - 1015 cm-2 s-1; parameters such as ion angle of incidence and exposed area are also controllable during the experiment. IMPACT has diagnostics that allow full characterization of the beam, including a Faraday cup, a beam imaging system, and a retarding field energy analyzer. IMPACT is equipped with multiple diagnostics, such as electron (Auger, photoelectron) and ion scattering spectroscopies that allow different probing depths of the sample to monitor compositional changes in multicomponent and/or layered targets. A unique real-time erosion diagnostic based on a dual quartz crystal microbalance measures deposition from an eroding surface with rates smaller than 0.01 nms, which can be converted to a sputter yield measurement. The monitoring crystal can be rotated and placed in the target position so that the deposited material on the quartz crystal oscillator surface can be characterized without transfer outside of the vacuum chamber.
UR - http://www.scopus.com/inward/record.url?scp=36749058471&partnerID=8YFLogxK
U2 - 10.1063/1.2805677
DO - 10.1063/1.2805677
M3 - Artículo
AN - SCOPUS:36749058471
SN - 0034-6748
VL - 78
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 11
M1 - 113105
ER -