Flexible PEDOT:PSS/ZnO Schottky diodes on polyimide substrates

N. Hernandez-Como, M. Lopez-Castillo, F. J. Hernandez-Cuevas, H. Baez-Medina, R. Baca-Arroyo, M. Aleman

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In this work, we used a high work function polymer, PEDOT:PSS, as a Schottky contact in combination with ZnO as the n-type semiconductor. These lead to the formation of a Schottky diode in a flexible polyimide substrate. The flexible device was fabricated using four photolithography steps for further application in circuits with a maximum processing temperature of 300 °C. The electrical characteristics, J-V and C[sbnd]V, were evaluated while performing several bending conditions. The bending radius used in this work were 4, 2 and 1 mm. The variation of the extracted electrical parameters (n, J0, Von, φB, Rs, Ion/Ioff ratio, ND, and Vbi) as a function of the bending radius is discussed.

Original languageEnglish
Article number111060
JournalMicroelectronic Engineering
StatePublished - 15 Aug 2019


  • Flexible electronics
  • Photolithography
  • Schottky diode

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