Efecto de la temperatura de substrato en las propiedades estructurales, ópticas y ferroeléctricas de películas delgadas de BaTiO3depositadas por RF sputtering

A. Márquez-Herrera, E. Hernández-Rodríguez, O. Calzadilla-Amaya, M. Meléndez-Lira, M. Zapata-Torres

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Thin Films of Barium Titanate (BaTiO 3 ) were grown on nichrome and quartz substrates, using a BaTiO 3 target, by RF-sputtering technique. We varied the substrate temperature in order to study its effect on the structural, optical and ferroelectric properties of the samples. The results of the X-Ray diffraction showed tetragonal structure with increases of the cristallinity as increases the substrate temperature. Furthermore, it observed by ultraviolet-visible (UV-VIS) spectroscopy that the band gap decreased as the substrate temperature increases showing abrupt sharp decrease at 494.8°C. The ferroelectric properties of the films showed a dependence with substrate temperature, the best ferroelectric answer was obtained at 494.8°C.
Original languageAmerican English
Pages (from-to)308-312
Number of pages5
JournalRevista Mexicana de Fisica
StatePublished - 1 Jan 2012
Externally publishedYes


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