Efecto de la temperatura de substrato en las propiedades estructurales, ópticas y ferroeléctricas de películas delgadas de BaTiO3 depositadas por RF sputtering

A. Márquez-Herrera; E. Hernández-Rodríguez; O. Calzadilla-Amaya; M. Meléndez-Lira; M. Zapata-Torres

Efecto de la temperatura de substrato en las propiedades estructurales, ópticas y ferroeléctricas de películas delgadas de BaTiO₃ depositadas por RF sputtering

A. Márquez-Herrera, E. Hernández-Rodríguez, O. Calzadilla-Amaya, M. Meléndez-Lira, M. Zapata-Torres

Research output: Contribution to journal › Article › peer-review

Abstract

Thin Films of Barium Titanate (BaTiO₃) were grown on nichrome and quartz substrates, using a BaTiO₃ target, by RF-sputtering technique. We varied the substrate temperature in order to study its effect on the structural, optical and ferroelectric properties of the samples. The results of the X-Ray diffraction showed tetragonal structure with increases of the cristallinity as increases the substrate temperature. Furthermore, it observed by ultraviolet-visible (UV-VIS) spectroscopy that the band gap decreased as the substrate temperature increases showing abrupt sharp decrease at 494.8°C. The ferroelectric properties of the films showed a dependence with substrate temperature, the best ferroelectric answer was obtained at 494.8°C.

Original language	Spanish
Pages (from-to)	308-312
Number of pages	5
Journal	Revista Mexicana de Fisica
Volume	58
Issue number	4
State	Published - 2012
Externally published	Yes

Cite this

@article{2181b26f8ba245d9a49f996a88c2200c,

title = "Efecto de la temperatura de substrato en las propiedades estructurales, {\'o}pticas y ferroel{\'e}ctricas de pel{\'i}culas delgadas de BaTiO3 depositadas por RF sputtering",

abstract = "Thin Films of Barium Titanate (BaTiO3) were grown on nichrome and quartz substrates, using a BaTiO3 target, by RF-sputtering technique. We varied the substrate temperature in order to study its effect on the structural, optical and ferroelectric properties of the samples. The results of the X-Ray diffraction showed tetragonal structure with increases of the cristallinity as increases the substrate temperature. Furthermore, it observed by ultraviolet-visible (UV-VIS) spectroscopy that the band gap decreased as the substrate temperature increases showing abrupt sharp decrease at 494.8°C. The ferroelectric properties of the films showed a dependence with substrate temperature, the best ferroelectric answer was obtained at 494.8°C.",

keywords = "Annealing, Heater system, Thin films",

author = "A. M{\'a}rquez-Herrera and E. Hern{\'a}ndez-Rodr{\'i}guez and O. Calzadilla-Amaya and M. Mel{\'e}ndez-Lira and M. Zapata-Torres",

year = "2012",

language = "Espa{\~n}ol",

volume = "58",

pages = "308--312",

journal = "Revista Mexicana de Fisica",

issn = "0035-001X",

number = "4",

}

Efecto de la temperatura de substrato en las propiedades estructurales, ópticas y ferroeléctricas de películas delgadas de BaTiO₃ depositadas por RF sputtering. / Márquez-Herrera, A.; Hernández-Rodríguez, E.; Calzadilla-Amaya, O. et al.
In: Revista Mexicana de Fisica, Vol. 58, No. 4, 2012, p. 308-312.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Efecto de la temperatura de substrato en las propiedades estructurales, ópticas y ferroeléctricas de películas delgadas de BaTiO3 depositadas por RF sputtering

AU - Márquez-Herrera, A.

AU - Hernández-Rodríguez, E.

AU - Calzadilla-Amaya, O.

AU - Meléndez-Lira, M.

AU - Zapata-Torres, M.

PY - 2012

Y1 - 2012

N2 - Thin Films of Barium Titanate (BaTiO3) were grown on nichrome and quartz substrates, using a BaTiO3 target, by RF-sputtering technique. We varied the substrate temperature in order to study its effect on the structural, optical and ferroelectric properties of the samples. The results of the X-Ray diffraction showed tetragonal structure with increases of the cristallinity as increases the substrate temperature. Furthermore, it observed by ultraviolet-visible (UV-VIS) spectroscopy that the band gap decreased as the substrate temperature increases showing abrupt sharp decrease at 494.8°C. The ferroelectric properties of the films showed a dependence with substrate temperature, the best ferroelectric answer was obtained at 494.8°C.

AB - Thin Films of Barium Titanate (BaTiO3) were grown on nichrome and quartz substrates, using a BaTiO3 target, by RF-sputtering technique. We varied the substrate temperature in order to study its effect on the structural, optical and ferroelectric properties of the samples. The results of the X-Ray diffraction showed tetragonal structure with increases of the cristallinity as increases the substrate temperature. Furthermore, it observed by ultraviolet-visible (UV-VIS) spectroscopy that the band gap decreased as the substrate temperature increases showing abrupt sharp decrease at 494.8°C. The ferroelectric properties of the films showed a dependence with substrate temperature, the best ferroelectric answer was obtained at 494.8°C.

KW - Annealing

KW - Heater system

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=84867501841&partnerID=8YFLogxK

M3 - Artículo

SN - 0035-001X

VL - 58

SP - 308

EP - 312

JO - Revista Mexicana de Fisica

JF - Revista Mexicana de Fisica

IS - 4

ER -

Efecto de la temperatura de substrato en las propiedades estructurales, ópticas y ferroeléctricas de películas delgadas de BaTiO₃ depositadas por RF sputtering

Abstract

Other files and links

Fingerprint

Cite this