Diseño de un dispositivo sensor de masa tipo MEMS basado en microvigas en voladizo de polisilicio

R. Sánchez-Fraga; V. H. Ponce-Ponce; M. A. Ramírez-Salinas; H. Estrada-Vázquez; J. Munguía-Cervantes

Diseño de un dispositivo sensor de masa tipo MEMS basado en microvigas en voladizo de polisilicio

Translated title of the contribution: Design of a MEMS mass sensor device based in oscillating polysilicon microcantilevers

R. Sánchez-Fraga, V. H. Ponce-Ponce, M. A. Ramírez-Salinas, H. Estrada-Vázquez, J. Munguía-Cervantes

Centro de Investigación en Computación (CIC)

Research output: Contribution to journal › Article › peer-review

Abstract

This work presents three MEMS mass sensor devices based in oscillating polysilicon cantilevers whose oscillation frequency shifts, due to corresponding changes of an added mass in the reaction container/area, can be better measured. An electrostatic actuator is used which consists of interdigitated electrodes configured to maximize the cantilever's oscillation amplitude. In consequence, integration design issues between the microelectromechanical device and the signal conditioning and acquisition circuitry are addressed. These designs are to be fabricated in the SUMMiT-V process and they can be suitable for biological or chemical applications. The feasibility of the proposed designs is supported by a mathematical model and FEA calculations performed in COMSOL and ANSYS and mass resolutions of de 3.43 pg/Hz, 6.71 pg/Hz y 17.31 pg/Hz were obtained.

Translated title of the contribution	Design of a MEMS mass sensor device based in oscillating polysilicon microcantilevers
Original language	Spanish
Pages (from-to)	61-65
Number of pages	5
Journal	Superficies y Vacio
Volume	27
Issue number	2
State	Published - Jun 2014

Cite this

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title = "Dise{\~n}o de un dispositivo sensor de masa tipo MEMS basado en microvigas en voladizo de polisilicio",

abstract = "This work presents three MEMS mass sensor devices based in oscillating polysilicon cantilevers whose oscillation frequency shifts, due to corresponding changes of an added mass in the reaction container/area, can be better measured. An electrostatic actuator is used which consists of interdigitated electrodes configured to maximize the cantilever's oscillation amplitude. In consequence, integration design issues between the microelectromechanical device and the signal conditioning and acquisition circuitry are addressed. These designs are to be fabricated in the SUMMiT-V process and they can be suitable for biological or chemical applications. The feasibility of the proposed designs is supported by a mathematical model and FEA calculations performed in COMSOL and ANSYS and mass resolutions of de 3.43 pg/Hz, 6.71 pg/Hz y 17.31 pg/Hz were obtained.",

keywords = "Cantilever, Electrostatic actuator, MEMS, Microelectronics, Sensor",

author = "R. S{\'a}nchez-Fraga and Ponce-Ponce, {V. H.} and Ram{\'i}rez-Salinas, {M. A.} and H. Estrada-V{\'a}zquez and J. Mungu{\'i}a-Cervantes",

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T1 - Diseño de un dispositivo sensor de masa tipo MEMS basado en microvigas en voladizo de polisilicio

AU - Sánchez-Fraga, R.

AU - Ponce-Ponce, V. H.

AU - Ramírez-Salinas, M. A.

AU - Estrada-Vázquez, H.

AU - Munguía-Cervantes, J.

PY - 2014/6

Y1 - 2014/6

N2 - This work presents three MEMS mass sensor devices based in oscillating polysilicon cantilevers whose oscillation frequency shifts, due to corresponding changes of an added mass in the reaction container/area, can be better measured. An electrostatic actuator is used which consists of interdigitated electrodes configured to maximize the cantilever's oscillation amplitude. In consequence, integration design issues between the microelectromechanical device and the signal conditioning and acquisition circuitry are addressed. These designs are to be fabricated in the SUMMiT-V process and they can be suitable for biological or chemical applications. The feasibility of the proposed designs is supported by a mathematical model and FEA calculations performed in COMSOL and ANSYS and mass resolutions of de 3.43 pg/Hz, 6.71 pg/Hz y 17.31 pg/Hz were obtained.

AB - This work presents three MEMS mass sensor devices based in oscillating polysilicon cantilevers whose oscillation frequency shifts, due to corresponding changes of an added mass in the reaction container/area, can be better measured. An electrostatic actuator is used which consists of interdigitated electrodes configured to maximize the cantilever's oscillation amplitude. In consequence, integration design issues between the microelectromechanical device and the signal conditioning and acquisition circuitry are addressed. These designs are to be fabricated in the SUMMiT-V process and they can be suitable for biological or chemical applications. The feasibility of the proposed designs is supported by a mathematical model and FEA calculations performed in COMSOL and ANSYS and mass resolutions of de 3.43 pg/Hz, 6.71 pg/Hz y 17.31 pg/Hz were obtained.

KW - Cantilever

KW - Electrostatic actuator

KW - MEMS

KW - Microelectronics

KW - Sensor

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M3 - Artículo

SN - 1665-3521

VL - 27

SP - 61

EP - 65

JO - Superficies y Vacio

JF - Superficies y Vacio

IS - 2

ER -

Diseño de un dispositivo sensor de masa tipo MEMS basado en microvigas en voladizo de polisilicio

Abstract

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