TY - JOUR
T1 - Design and Simulation of a Closed Loop Controlled Linear Displacement MEMS Micromotor, Based on a Floating Gate Transistor
AU - López-Tapia, Andrea
AU - Mares-Carreño, Jesús
AU - Abarca–Jiménez, Griselda Stephany
AU - Reyes–Barranca, Mario Alfredo
N1 - Publisher Copyright:
© 2023, The Author(s), under exclusive licence to Springer Nature B.V.
PY - 2023/9
Y1 - 2023/9
N2 - This work consists of a proposal of a micromotor with a linearly displaced shaft, driven by electrostatic forces designed for CMOS-MEMS technology. Four springs and a set of mobile electrodes make up the body of the micromotor; in turn, a plate whose function is to sense the position is attached to the main body, making the system a closed loop instance. A floating gate MOS transistor (FGMOS) is connected to the sensor plate of the micromotor’s body to form the sensing system. The main body is made of a structural layer of aluminum, while a layer of polysilicon is used for the floating gate of the transistor which can operate as the shaft’s position sensor. The proposed electronics and microsystem are monolithic, and the substrate is a single silicon wafer. Multiphysics simulations of the micromotor were performed considering a quasi-static case, since it is the one that best suits the behavior of the proposed micromotor, the results of the simulations show good agreement with the theoretical model.
AB - This work consists of a proposal of a micromotor with a linearly displaced shaft, driven by electrostatic forces designed for CMOS-MEMS technology. Four springs and a set of mobile electrodes make up the body of the micromotor; in turn, a plate whose function is to sense the position is attached to the main body, making the system a closed loop instance. A floating gate MOS transistor (FGMOS) is connected to the sensor plate of the micromotor’s body to form the sensing system. The main body is made of a structural layer of aluminum, while a layer of polysilicon is used for the floating gate of the transistor which can operate as the shaft’s position sensor. The proposed electronics and microsystem are monolithic, and the substrate is a single silicon wafer. Multiphysics simulations of the micromotor were performed considering a quasi-static case, since it is the one that best suits the behavior of the proposed micromotor, the results of the simulations show good agreement with the theoretical model.
KW - CMOS-MEMS
KW - Closed loop
KW - Electrostatic force
KW - FGMOS
KW - Linear micromotor
KW - Multiphysics simulations
UR - http://www.scopus.com/inward/record.url?scp=85158109240&partnerID=8YFLogxK
U2 - 10.1007/s12633-023-02393-8
DO - 10.1007/s12633-023-02393-8
M3 - Artículo
AN - SCOPUS:85158109240
SN - 1876-990X
VL - 15
SP - 6047
EP - 6060
JO - Silicon
JF - Silicon
IS - 14
ER -