Design and fabrication of a bidimentional microbolometer array for Terahertz detection characterized at different temperatures

Physics & Astronomy

• bolometers 100%
• fabrication 52%
• diborane 31%
• temperature 25%
• focal plane devices 24%
• micromachining 24%
• detectors 23%
• silicon films 23%
• dark current 22%
• liquid nitrogen 21%
• silicon nitrides 21%
• amorphous silicon 19%
• boron 18%
• lithography 18%
• vapor deposition 16%
• frequency ranges 16%
• illumination 16%
• membranes 15%
• low frequencies 15%
• augmentation 13%
• sensitivity 12%
• room temperature 12%
• characterization 12%
• radiation 11%
• coefficients 11%
• electric potential 11%
• silicon 11%
• performance 9%