TY - JOUR
T1 - Chemically sprayed ZnO:(F, Zr) thin films
T2 - Effect of starting solution ageing time and substrate temperature on the physical properties
AU - Maldonado, A.
AU - Tirado-Guerra, S.
AU - de la, M.
N1 - Funding Information:
We thank A. Palafox-Gómez, M. A. Luna-Arias, and A. G. López-Fabián for their technical assistance. Support was provided by CONACyT under contract 55337.
PY - 2009/3
Y1 - 2009/3
N2 - Conductive and transparent fluorine and zirconium co-doped zinc oxide [ZnO:(F, Zr)] thin films have been deposited onto sodocalcic glass substrates by the chemical spray technique. The effects of starting solution ageing time and the substrate temperature on the transport, structural, and morphological properties of as-deposited ZnO:(F, Zr) thin films are presented in this paper. A decrease in the electrical resistivity values is observed as the starting solution used is more aged, reaching a minimum resistivity of the order of 1.3×10-2 Ω cm in samples deposited from a 17-day-aged solution, then increasing in samples deposited from solutions aged beyond this ageing time. According to the characterization results, the surface morphology is dependent on the solution ageing time. The X-ray diffraction patterns reveal that the ZnO:(F, Zr) thin films are polycrystalline in nature, fitting well with a hexagonal wurtzite structure, and showing the (0 0 2) planes as preferential growth in all the deposited films. The average optical transmittance, measured in the near UV-visible region, was of the order of 75% in all the cases.
AB - Conductive and transparent fluorine and zirconium co-doped zinc oxide [ZnO:(F, Zr)] thin films have been deposited onto sodocalcic glass substrates by the chemical spray technique. The effects of starting solution ageing time and the substrate temperature on the transport, structural, and morphological properties of as-deposited ZnO:(F, Zr) thin films are presented in this paper. A decrease in the electrical resistivity values is observed as the starting solution used is more aged, reaching a minimum resistivity of the order of 1.3×10-2 Ω cm in samples deposited from a 17-day-aged solution, then increasing in samples deposited from solutions aged beyond this ageing time. According to the characterization results, the surface morphology is dependent on the solution ageing time. The X-ray diffraction patterns reveal that the ZnO:(F, Zr) thin films are polycrystalline in nature, fitting well with a hexagonal wurtzite structure, and showing the (0 0 2) planes as preferential growth in all the deposited films. The average optical transmittance, measured in the near UV-visible region, was of the order of 75% in all the cases.
KW - A. Electronic materials
KW - A. Thin films
KW - C. X-ray diffraction
KW - D. Electrical properties
KW - D. Optical properties
UR - http://www.scopus.com/inward/record.url?scp=67349270627&partnerID=8YFLogxK
U2 - 10.1016/j.jpcs.2008.12.009
DO - 10.1016/j.jpcs.2008.12.009
M3 - Artículo
SN - 0022-3697
VL - 70
SP - 571
EP - 575
JO - Journal of Physics and Chemistry of Solids
JF - Journal of Physics and Chemistry of Solids
IS - 3-4
ER -