Abstract
This article reviews the progress in the chemical vapor deposition of iridium, platinum, rhodium and palladium metals. In the course of the last decade the number of articles on CVD of this group of metals has increased significantly. A wide variety of metal organic complexes have been investigated as potential precursors and appreciable results have been obtained. However, some aspects such as low deposition rates and impurity incorporation into the films still remain as concerns in this area. The representative results on CVD of these metals are presented according to the type of metal organic complexes used.
Original language | English |
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Pages (from-to) | 1717-1728 |
Number of pages | 12 |
Journal | Materials Transactions |
Volume | 44 |
Issue number | 9 |
DOIs | |
State | Published - Sep 2003 |
Externally published | Yes |
Keywords
- Chemical vapor deposition
- Metal organic complex
- Noble metals
- Platinum group metals