TY - JOUR
T1 - Characterization of ZrO 2 thin films deposited by MOCVD as ceramic coatings
AU - Torres-Huerta, A. M.
AU - Domínguez-Crespo, M. A.
AU - Onofre-Bustamante, E.
AU - Flores-Vela, A.
N1 - Funding Information:
Acknowledgements The authors thank S. B. Brachetti-Sibaja for the SEM and AFM images. Financial support from Instituto Polit-écnico Nacional trough the SIP20113425, SIP20113768 and CONACYT trough the CB2009-132660 and CB2009-133618 projects and to SNI-CONACYT are gratefully acknowledged.
PY - 2012/3
Y1 - 2012/3
N2 - Transparent cubic-, tetragonal-zirconia thin films were successfully deposited on glass and quartz substrates by using the metalorganic chemical deposition technique. The thin films were achieved by adjusting deposition parameters such as substrate temperature, oxygen partial pressure, and zirconium acetylacetonate (Zr(acac) 4) used as precursor. Structural and morphological characterizations of the as-deposited thin films were studied by XRD, Raman spectroscopy, SEM, and AFM techniques, while some optical properties such as transmittance and refractive index were determined by means of the UV-vis technique. The ZrO 2 films, grown at 700 °C and different $$ P-{{{\text{O}}-{ 2} }}{:}P-{{\text{Zr(acac)}-{4} }} $$ ratios, displayed very variable particle sizes ranging from ~0.2 to 1.0 μm, and crystallite sizes within 10-30 nm forming a uniform film. Low mean roughness was obtained in the samples, which varied from 0.674 to 1.33 nm. These films grew with a columnar structure and apparently with low carbon content (<0.2%). All the synthesized thin films showed an adequate optical transmission, but the most transparent (>80%) was obtained with a $$ P-{{{\text{O}}-{ 2} }} {:}P-{{\text{Zr(acac)}-{4} }} $$ ratio of (Pa) 107:0.2. The oxygen partial pressure influences the crystallinity of the as-deposited films, while the refractive index remains constant.
AB - Transparent cubic-, tetragonal-zirconia thin films were successfully deposited on glass and quartz substrates by using the metalorganic chemical deposition technique. The thin films were achieved by adjusting deposition parameters such as substrate temperature, oxygen partial pressure, and zirconium acetylacetonate (Zr(acac) 4) used as precursor. Structural and morphological characterizations of the as-deposited thin films were studied by XRD, Raman spectroscopy, SEM, and AFM techniques, while some optical properties such as transmittance and refractive index were determined by means of the UV-vis technique. The ZrO 2 films, grown at 700 °C and different $$ P-{{{\text{O}}-{ 2} }}{:}P-{{\text{Zr(acac)}-{4} }} $$ ratios, displayed very variable particle sizes ranging from ~0.2 to 1.0 μm, and crystallite sizes within 10-30 nm forming a uniform film. Low mean roughness was obtained in the samples, which varied from 0.674 to 1.33 nm. These films grew with a columnar structure and apparently with low carbon content (<0.2%). All the synthesized thin films showed an adequate optical transmission, but the most transparent (>80%) was obtained with a $$ P-{{{\text{O}}-{ 2} }} {:}P-{{\text{Zr(acac)}-{4} }} $$ ratio of (Pa) 107:0.2. The oxygen partial pressure influences the crystallinity of the as-deposited films, while the refractive index remains constant.
UR - http://www.scopus.com/inward/record.url?scp=84857653650&partnerID=8YFLogxK
U2 - 10.1007/s10853-011-6044-0
DO - 10.1007/s10853-011-6044-0
M3 - Artículo
SN - 0022-2461
VL - 47
SP - 2300
EP - 2309
JO - Journal of Materials Science
JF - Journal of Materials Science
IS - 5
ER -