Automated Instrument for the Deposition of Thin Films Using Successive Ionic Layer Adsorption and Reaction

Rosa M. Woo-García, Isaac Rodríguez-Ibarra, Edith Osorio-De-la-rosa, Cesia Guarneros-Aguilar, Felipe Caballero-Briones, Ricardo Agustín-Serrano, Agustín L. Herrera-May, Francisco López-Huerta

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Engineering & Materials Science

Chemistry