European Patent Office awards patent to TECHNICAL INST OF PHYSICS AND CHEMISTRY OF THE CHINESE ACADEMY OF SCIENCES for "MASKLESS PHOTOLITHOGRAPHIC SYSTEM IN COOPERATIVE WORKING MODE FOR CROSS-SCALE STRUCTURE"

Press/Media: Press / Media

Period1 Jan 2021

Media coverage

1

Media coverage

  • TitleEuropean Patent Office awards patent to TECHNICAL INST OF PHYSICS AND CHEMISTRY OF THE CHINESE ACADEMY OF SCIENCES for "MASKLESS PHOTOLITHOGRAPHIC SYSTEM IN COOPERATIVE WORKING MODE FOR CROSS-SCALE STRUCTURE"
    Media name/outletImpact Financial News
    Date1/01/21
    PersonsShihai Dong